Used NANOMETRICS NanoSpec 6100 #293795183 for sale
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NANOMETRICS NanoSpec 6100 is an advanced mask and wafer inspection equipment designed to accurately and efficiently inspect both masks and wafers simultaneously, allowing the user to quickly identify any defects on both types of workpieces. The system offers multiple modes of operation and is capable of top-down, bottom-up, and hard mask inspection modes, allowing the user to identify and inspect defects at any height. With a wide range of viewing modes, NanoSpec 6100 is able to provide pixel-by-pixel analysis of the wafers and masks, allowing the user to identify subtle defects that would be difficult to detect using traditional inspection methods. The unit also includes advanced imaging capabilities, such as Oblique Illumination (OI) and Dark-Field Illumination (DFI) to maximize contrast and improve defect identification. These features can be used to reveal features and features not visible with other illumination techniques, such as sidewall defects, missing vias, and contacts. With the optional advanced color camera, NANOMETRICS NanoSpec 6100 is capable of performing automatic red, green, and blue ICCD camera image capture, LED and flash color illumination, and True Color Edge Detection. The machine also has a range of automated inspection tools to maximize productivity, including automated tool synchro-scan, automated scan frequency optimization, automatic stiching for large area inspection, and automatic focus optimization. The asset also includes a range of unique features such as an optional backside illumination module, vector trajectory scanning, automatic defect compensation, depth of field tuning, and a module for on-line defect review. NanoSpec 6100 has an efficient workflow with streamlining features such as automatic defect detection, classification, and auto-report generation, which can reduce inspection time and improve productivity. The model also includes powerful data management tools for comprehensive review, analysis, and comparison of wafer and mask data that can be used for top-down, bottom-up, and hard mask inspection. NANOMETRICS NanoSpec 6100 is a fully automated and versatile mask and wafer inspection equipment which increases productivity and improves accuracy. With a range of imaging capabilities and advanced automation tools, NanoSpec 6100 is ideal for linking wafer and mask inspection and ensuring reliable yields.
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