Used NANOMETRICS NanoSpec TM 8000X #9260053 for sale
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ID: 9260053
Vintage: 1999
Measurement system
Film stacks back / front: Poly, oxide and multilayer
Fourier Transform Infrared (FTIR) film analysis
Visible and UV reflectometer
Sophisticated modeling algorithms
Submicron precision XY table for silicon substrates: Up to 200 mm
High throughput multitasking robotics
SECS II / GEM Compliance
FTIR Module laser
Touch screen monitor
1999 vintage.
NANOMETRICS NanoSpec TM 8000X is a state of the art mask & wafer inspection equipment. It is designed for both manufacturers and research and development in the semiconductor industry. This system offers a variety of tools and features, making it suitable for even the most demanding inspection tasks. NanoSpec TM 8000X is optimized for process control and research purposes. To achieve optimal imaging results, the unit is equipped with a 25.6cm-diameter inspection chamber, 30X objective lens and a brightfield light source. Sophisticated hardware and software control components are combined to achieve multiple video luminance ranges and a range of field-of-view settings, allowing measurements up to 20μm. NANOMETRICS NanoSpec TM 8000X incorporates the latest developments in sample handling technology. It is provided with a wafer motor drive and a wafer handling mechanism to ensure repeatable and accurately centered sample placement. The XYZ positioning machine is computer controlled and uses a linear positioning tool to simulate the samples' Z position for image acquisition. X, Y and Z Stage increments are 0.1μm or 0.2μm when configured for extra fine focus. Additionally, NanoSpec TM 8000X offers a variety of image enhancement tools. These include Two Dimensional Filtered Subtraction Correction (2D FSC), Frame Averaging, Mask Contrast Adjustment (MCA), Noise Reduction, as well as an advanced image capture asset. These features allow users to reduce image noise and measure their samples with higher accuracy and repeatability. NANOMETRICS NanoSpec TM 8000X is also conforms to various industry protocols and standards. The model supports SEMI Standard Specification E116 Particle Contamination Inspection. Compliance to the standard is met through the integrated automated defect classification engine. By using NanoSpec TM 8000X, companies can be sure that any mask or wafer being inspected is being done accurately and at the highest possible standards. Not only will this save time and money, but it will also give companies the confidence that their product will meet industry requirements and have the desired outcome.
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