Used NIKON AMI-3300 #293670595 for sale

NIKON AMI-3300
ID: 293670595
Macro inspection systems.
NIKON AMI-3300 is a fully-automated mask and wafer inspection equipment that provides rapid, high-resolution inspection. Featuring a 400mm telecentric objective lens coupled with a 16-bit CCD camera, AMI-3300 offers high-resolution imaging that enables precise inspection of mask and wafer surfaces. The system's adjustable magnification, working distance and field of view provides the capability to quickly and accurately inspect a wide range of samples including reticles, masks, microstructures, and wafers. NIKON AMI-3300 provides full sample coverage with its 500mm X-Y stage, featuring closed-loop, high-resolution nanometer level positioning and repeatability. In addition, AMI-3300 is equipped with an automated focus sub-stage, providing rapid and accurate changes in the working distance and field of view to adjust for different samples. NIKON AMI-3300's software automatically performs all required focus adjustments on the mask or wafer while measuring the focal position for optimal focus capture. AMI-3300 includes an integrated defect measurement unit that provides the ability to detect, classify, and quantify a wide range of defects. The machine's automated edge detection, color-based edge detection, and pattern recognition technologies are used to detect any defects, such as line edges, line widths, line pitch, flatness, overlay accuracy, process misalignment, leakage, and overlay. In addition, automated edge correction feature of the tool is used to detect any edge stepping remaining due to lithographic poxing, generating the precise and accurate edge sharpness required for successful device scaling. NIKON AMI-3300 features an intuitive user interface and software that enables easy setup and operation of the asset. The large 21.3-inch LCD color monitor offers the ability to quickly navigate through the model's menus and operations, while the USB and network ports provide quick and simple connection of any external storage device. The equipment also includes automated job execution and scheduled job execution capabilities that enable users to plan and save their measurement jobs for later use. Overall, AMI-3300 is a high-resolution mask and wafer inspection system that provides robust and reliable inspection capabilities. With its adjustable magnification, focus sub-stage, large X-Y stage, and automated defect measurement functionalities, NIKON AMI-3300 is a powerful solution for precise mask and wafer inspection.
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