Used NIKON Optistation 3 #9171326 for sale

ID: 9171326
Vintage: 1991
Wafer inspection system, parts machine 1991 vintage.
NIKON Optistation 3 is a state of the art electronic mask and wafer inspection equipment. It is designed to provide users with the high accuracy, high speed, and data accuracy that are required for optical inspection of demanding semiconductor ICs. This system is a fully automated mask or wafer alignment tool that provides high-precision imaging and detailed measurements of masked and wafer features with a unit accuracy of ±1μm. It has a wide range of features that make it suitable for various kinds of optical inspections. NIKON OPTISTATION-3 boasts a new high-precision 12-inch CCD camera, which is capable of providing up to 1000x magnification and offering a field of view of up to 6.3 mm with microscopic precision. It features a 3-axis motor operation machine and a control tool for the offered magnification power that can be adjusted between 0.5X to 1000X. It also offers a 20-second exposure time for higher resolution images. The stability of the CCD camera is one of the key features that makes it best-suited for demanding operations. Optistation 3 also offers an array of inspection capabilities with three simultaneous electronic Beam Inspection modes. These include spot inspection for examining circuit patterns, global surface inspection for inspecting wafer structures, and peripheral field inspection for widening the inspection range. It also offers an image overlay feature to compare tightly masked patterns of multiple layers. To maximize the accuracy of mask and wafer inspection, OPTISTATION-3 features integrated anti-collision, accurate field matching, and auto-focus alignment functions. The integrated anti-collision function, in particular, enables greater accuracy and eliminates false data by avoiding collisions between the optics and the objects being inspected. To further improve the accuracy and efficiency of inspection operations, NIKON Optistation 3 features a full-featured, optimized data acquisition and analysis asset. It is also capable of performing various data analyses as well as generating data reports. Finally, NIKON OPTISTATION-3 is an extremely durable model. This equipment is designed to be stable and reliable over long periods of time, making it ideal for continuous operations.
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