Used NIKON Optistation 3000 #9372005 for sale

ID: 9372005
Wafer Size: 12"
Inspection system, 12" NIKON L300, 12" (Brightfield / Darkfield and DIC Observation) Non-contact wafer alignment Standard cassette type: FOUP FOSB FFO Micro inspection: Surface Backside Edge Wafer transfer system: High-speed Multi-Axis robot Reliability: Availability: >95% MTBF: 1500 Hours Stage: 360° Rotation Vacuum: -66.7 KPa / -30 Nl / min Power supply: 200 VAC-10%, 10A, 50/60 Hz.
NIKON Optistation 3000 is a fully-automated mask and wafer inspection equipment designed for high-accuracy, high-throughput production of the next generation of semiconductor products. The system features an advanced optical imaging unit, comprising high-performance objectives, and both visible and infrared-sensitive photosensors. Utilizing a unique process control machine, precise positioning, and automated edge find algorithms, Optistation 3000 ensures precise, high-speed automated inspection of wafers and masks. At the heart of NIKON Optistation 3000 resides a precise 3D scanning tool and advanced software algorithms. Utilizing a large-diameter objective lens, high performance positioner, and advanced software routines, Optistation 3000 is capable of detecting and measuring wide-area defects, as well as extremely small, localized defects in the order of nanometer scale. With 2D and 3D Edge Find, including Edge Searcher, NIKON Optistation 3000 automatically locates the edges of a wafer or mask and executes inspection paths accordingly. Optistation 3000 is fitted with a unique custom polarization module, allowing for precise optical characterization, measurements and defect detection. Similarly, the asset is equipped with an integrated focus-tracking model capable of constantly monitoring and adjusting focus based on detected vertical height difference in the sample surface. NIKON Optistation 3000 also offers full traceability via its sophisticated audit-trail library that stores and documents detailed inspection results, production, process, operator, and lot ID information. Additionally, the equipment offers an optional high-quality linearity measurement package for inspecting sample-overlay map, as well as inspection of OSML mask focus value. In summary, Optistation 3000 is a powerful and reliable automated mask and wafer inspection system for high-accuracy, high-throughput production environments. With a large diameter objective lens, advanced optical imaging and polarization unit, and unique process control algorithms, NIKON Optistation 3000 offers precise and reliable performance.
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