Used PRISM VIT-128 #293587219 for sale

PRISM VIT-128 is a state-of-the-art mask and wafer inspection equipment from PRISM series developed by KLA-Tencor. The system is capable of inspecting the full range of masks and substrates used in the fabrication of integrated circuits and is specifically designed to enable ultra-high throughput. The powerful inspection capabilities of VIT-128 are made possible by the unique combination of technologies it employs. At its core, the unit leverages a high-resolution quadruple nano-spot projection machine giving it a detection resolution of below 0.1 micrometres. Coupled with a 1.3 mega-pixel camera, the tool is capable of inspecting both projections and backlit images of mask and wafer defects in real-time. Furthermore, the asset exhibits an impressive inspection speed of up to 100K wafers per hour and a high throughput rate of over 1 million wafers per month. PRISM VIT-128 utilizes patented imaging technologies such as variable focus four-channel imaging (FFT) and spatial resolving scatterometry (SRS) for precise, repeatable, and reliable inspection results. This improves the accuracy and sensitivity of the model to detect defects, thereby reducing the rate of false-positive detections. Furthermore, the equipment utilizes brightfield, darkfield, and attenuated brightfield illumination modes, enabling better visualization of mask and wafer patterns to inspect a variety of layers and substrates. VIT-128 provides powerful yet flexible automated and manual defect review, allowing thorough and comprehensive analysis. It includes a powerful wafer-based review using an XYZ microscope, allowing precise inspection of complex devices and precise characterization of multiple defect types. Additionally, the system includes KLA-Tencor's Defect Origin Mapping (DOM™) technology enabling greater control and accuracy when identifying defects and their origins. Finally, the unit offers real-time access to defect topography through the use of the KLA-Tencor's TotalPrint™ imaging machine. This enables users to capture and store images of defects and use them for further analysis and review. With TotalPrint's high resolution images, it is even possible to compare defect detections between different inspection stations for further engineering validation. Overall, PRISM VIT-128 is a highly reliable and powerful mask and wafer inspection tool providing unparalleled defect detection and characterization capabilities. Its high-resolution imaging and innovative defect review capabilities enable it to detect a variety of defects with high accuracy, thus ensuring defect-free integrated circuits.