Used RUDOLPH / ONTO INNOVATION WHS220 / Axi-940b #9394722 for sale
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ID: 9394722
Vintage: 2009
Macro defect inspection system, 4"-6"
Wafer cassette
Monochrome inspection camera
Color review camera.
Robot with single arm
Pre-aligner and single OCR reader
Computer running with Windows 7
2009 vintage.
RUDOLPH / ONTO INNOVATION WHS220 / Axi-940b is a mask and wafer inspection equipment that combines 4 different technologies—optical and electron microscopy, image processing, and software-driven automation—to provide an advanced, accurate, and efficient inspection solution. The system utilizes a UV transmitted light illumination that minimizes contaminants on the wafer surfaces, which is essential to maintaining high image quality. A powerful automated wafer transport unit and advanced software-driven automation allow RUDOLPH WHS220 / Axi-940b to quickly scan a large number of wafers, while the machine's integrated positioning tool provides high-precision and reliable wafer setup for accurate inspection. ONTO INNOVATION WHS220 / Axi-940b features a high resolution imaging asset that is capable of capturing high-quality images of semiconductor components, enabling it to detect the slightest defects. The model operates over a broad dynamic range, ensuring that even the most complex defect can be inspected while still maintaining image detail. Multi-segmented contrast adjustment technology can be used to optimize image exposure settings, allowing for near perfect inspection accuracy. Depending on the mask type and fabrication process, RUDOLPH/ONTOWHS220 / Axi-940b can inspect masks as small as 20nm and as large as 1μm in size. It can also detect defects such as particle imperfections, scratches, bridges, and protrusions. The equipment is also capable of high-speed automated inspection, ensuring that wafers are quickly and accurately inspected. RUDOLPH / ONTO INNOVATION WHS220 / Axi-940b also offers a comprehensive suite of software tools to facilitate user-friendly operation and sophisticated image processing. The included image analysis software allows for automated inspection and detailed defect characterization. The software can also perform a wide range of statistical analysis, making it great for tight manufacturing quality control. Overall, RUDOLPH WHS220 / Axi-940b offers a comprehensive, reliable, and easy-to-use mask and wafer inspection solution. The system combines the best in optical and electron microscopy, image processing technologies, and automated automation to provide accurate and high-speed inspection, far surpassing traditional manual inspection methods. This allows users to quickly and accurately identify defects and effectively manage their fabrication process, leading to improved yields and cost savings.
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