Used RUDOLPH / ONTO INNOVATION WHS220 #293585586 for sale

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ID: 293585586
Vintage: 2010
Macro defect inspection system 2010 vintage.
RUDOLPH / ONTO INNOVATION WHS220 is a high-performance mask & wafer inspection equipment designed for inspection of wafers and masks. It is powered by a standard Intel Core i5 processor and can easily be upgraded with additional dedicated hardware such as image processors, larger RAM, and more hard drive space to enhance its performance. RUDOLPH WHS220 is based on a Windows 10 Pro operating system and a robust hardware platform which ensure reliable and repeatable inspection results. The unit features a vibrating stage, where the quartz wafers to be inspected are placed. The stage is driven by an advanced pancake stepper motor that makes the stage move along the X, Y and Z axes simultaneously, allowing the machine to transverse the entire wafer surface and capture data related to its features. The stage also ensures accurate and repeatable alignment of the wafer's features over the camera during the inspection cycle. ONTO INNOVATION WHS220 incorporates optical inspection technology and a high-precision commercial camera to acquire images of the wafer's features. To ensure optimal imaging conditions, a bright telecentric lighting tool is used, which delivers even illumination over the entire stage and field of view. An image-processing algorithm then analyzes the feature's size and shape to determine the correctness of each individual element. WHS220 also has an integrated mask-inspection module, designed to inspect dies and masks. A 5-axis robotic arm is used to accurately place the dies on the stage for mask inspection. The asset also incorporates a bright cold light-emitting diode (LED) illuminator and a 6 mega-pixel commercial camera that captures images which are compared against a pre-defined set of pass/fail criteria to evaluate the accuracy of the individual elements of the mask. RUDOLPH / ONTO INNOVATION WHS220 is the ideal tool to detect defects on both quartz wafer and masks since it provides fast, accurate and repeatable results. The model is easy to operate, with a user-friendly graphical user-interface designed for technicians, researchers and other users. Furthermore, it runs on a window-based platform which allows for easy integration with other processes. For enhanced accuracy and performance, the equipment is heavily customizable with additional hardware and software options available upon request.
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