Used SDI SPV / PDM 3020-P #138848 for sale

SDI SPV / PDM 3020-P Mask & Wafer Inspection Equipment is a comprehensive automated tool optimized for inspecting silicon wafers at the photomask level. The system is designed to provide unparalleled precision and accuracy in detecting defects, such as line-edge roughness and micro-shorts, on silicon wafers. SPV / PDM 3020-P can accurately measure wafer topography, overlay targets, and monitor lithography process variations. The unit offers advanced features including automated critical dimension (CD) measurement, automated defect identifiability, and automatic defect isolation with laser interferometry. These features provide better process control and improved yield. SDI SPV / PDM 3020-P can detect a wide range of defects, such as line edge roughness, edge puller notches, mask field variations, pattern shift, misalignment, other shape deformities, and micro-shorts. The machine has been constructed with a number of benefits to support mask related process monitoring. For example, the 3020-P supports both inline and post wafer processing with a variety of software packages. This enables quick assessment of lithography process deviation, accurate overlay and critical dimension measurement. It also includes unique control algorithms for different types of masks, including critical dimension layer, local CD layer, accurate feature matching and overlay, high-energy critical dimension SAR (Signal to Noise Ratio) and High-Precision Optical CD. SPV / PDM 3020-P has been designed to provide extremely high resolution metrology, up to 90nm. It has a high throughput rate, allowing it to inspect up to two wafers per hour, and supports a maximum wafer size of 300mm. The tool is also highly efficient, requiring minimal operator intervention and featuring an intuitive interface for easy operation. The 3020-P is ideally suited for production environments, mask shops, and research and development applications. The asset is also compact in size, weighing just 250 kg, and is highly reliable with a MTBF of 5,000 hours. Its operating temperature range can be adjusted from 18 to 28°C and its humidity range from 10 to 90%. Ultimately, SDI SPV / PDM 3020-P offers excellent performance, easy operation, and high efficiency, making it a great choice for the automated production of fine-line photomasks at the highest precision.