Used SEMILAB / SDI FAaSt 230 DP+SPV #293811109 for sale

SEMILAB / SDI FAaSt 230 DP+SPV
ID: 293811109
Wafer characterization system.
SDI FAaSt 230 DP+SPV is a mask and wafer inspection equipment that is used to inspect masks, wafers, and other optical device components during the fabrication process. The system is equipped with an automated inspection stage and an automation unit that is capable of handling a wide variety of workpieces and different inspections. The machine incorporates a 23-inch TFT-LCD dual-view display and standard programmable logic controllers (PLC) that help optimize the tool's workflow. The inspection stage is driven by SEMILAB exclusive Dynamic Wafer Center, allowing for precise positioning and stage motion. The asset also uses an integrated video sensor that allows for accurate image analysis and wafer and mask identification. The model has an automatic Zeiss adapter for precise mask alignment, an inspection objective lens and filter with a NA of 0.19, and a high-speed scanning digital electronics for speed and accuracy. The equipment is equipped with a powerful light source that is capable of outputting up to 20W of light for effective inspection of features down to 20 nm. It also has software that allows for visual defect review, image segmentation, and image processing. It also supports numerous image analysis algorithms, such as image filtering, image subtraction, and image registration, as well as a number of statistical and morphological parameters, such as contrast, sharpness, and defect area size. The system is capable of performing a variety of mask and wafer inspection tasks, such as, Mask Edge inspection. These inspections involve a high-power microscope to detect abnormalities at the edges of masks, including defects and pattern errors. The unit is also capable of delivering accurate, repeatable, and reliable defect classification and 3D defect volume measurement. The machine also includes specific tools for SPV (scanning probe microscopy) inspection. The software supports advanced data analysis and enables the measurement of small structures on the surface of a mask or wafer. The tool has several features for data collection, event control, analysis, and visualization. In conclusion, SEMILAB / SDI FAaSt 230 DP+SPV is a versatile mask and wafer inspection asset that is designed to deliver accurate, repeatable, and reliable results with a higher speed of operation. The model incorporates a 23-inch TFT-LCD dual-view display, standard programmable logic controllers (PLC), integrated video sensor, automatic Zeiss adapter for precise mask alignment, high-power light source, inspection objective lens, filter, and high-speed scanning digital electronics. It also has a powerful suite of software tools that enable effective image segmentation and image processing, as well as various image analysis algorithms. The equipment is capable of performing numerous mask and wafer inspection tasks, including Mask Edge inspection, and SPV (scanning probe microscopy) inspections as well.
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