Used SEMILAB / SDI FAAST 330A #9382822 for sale
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ID: 9382822
Vintage: 2004
Measuring system
Surface Photo Voltage (SPV)
Does not include robot
Optic signal device non functional
2004 vintage.
SEMILAB / SDI FAAST 330A is a state-of-the-art mask & wafer inspection equipment, designed for automated wafer inspection and subsequent measurement. The advanced, automated software helps to identify and locate problem areas on wafers and masks, in various geometries, to a nanometer resolution. The system is equipped with two vertical CCD cameras, providing unmatched image contrast and image capture resolution. These cameras are also set up to capture images with various scales (3-5µm/pixel) for inspecting various types of structures. This allows the operator to switch from inspecting small structures to large structures with ease. The unit also includes two vertical measuring sensors. The sensors are available in two resolution levels (up to 0.4µm and 1.2µm, respectively). They are used for accurately measuring the vertical geometries of the structures being inspected. Additionally, tilt-measurement of the structure is also available, with a resolution of 0.1°. The precise optical alignment of SDI FAAST 330A allows for easy and quick wafer overlay alignment, along with simultaneous capture and measurement. The automatic wafer alignment tool makes sure that all images captured are precisely aligned with the wafer. In addition, the machine also includes the Data Management and Process Control (DMPC) software. This cutting-edge software simplifies inspection and edit processes by allowing operators to control the entire tool processes from a single point of control. Finally, SEMILAB FAAST 330A has a built-in auto-calibration asset which verifies the model's accuracy and provides feedback on any potential problems. The feedback is then used to create a comprehensive report with all the parameters that need to be adjusted in order to maintain optimal accuracy. FAAST 330A is a reliable and comprehensive mask & wafer inspection equipment. Its automated and precise functions make it an ideal choice for professional mask & wafer inspection in multiple geometries and materials.
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