Used SEMILAB / SDI PV-2000A #9389454 for sale
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SEMILAB / SDI PV-2000A is a computer-controlled automated mask and wafer inspection equipment designed to meet the advanced requirements of critical photolithography inspection. SDI PV-2000A platform performs both optical inspection and electrical testing. It is a high-throughput system that can simultaneously inspect and test up to 2000 wafers or masks per hour. The machine provides in-depth inspection of photomask and wafer features, such as contact holes, line widths, overlay accuracy, and etch profile defects. SEMILAB PV-2000A is equipped with a 6"x6" high-resolution laser projection unit, a highly accurate vision machine, and advanced image processing algorithms. The tool performs CEMI (Contrast Estimation Mode Interferometry) for a laser interference wafer inspection, based on the light field intensity profile of the interference fringes. The asset makes an interference pattern by combining light and radiation waves from an anti-coherent source of light (scattered light from two laser beams), and compares the pattern to preset parameters. When a defect is found, the accuracy of the measurements taken with the integrated pixel sensor allows for sub-micron evaluation. The advanced optical spot detection procedures of PV-2000A are capable of detecting even the smallest of surface defects. The machine is also equipped with automated pattern recognition and smart search algorithms, which enables fast search, detection, and characterization of the defects. In addition, the model is fitted with an automatic focus module, ensuring reliable detection of contact holes even up to 1 micron accuracy. The equipment also features an integrated automated electrical testing system that performs various tests, such as resistance, capacitance, and breakdown voltage. The automated electrical test unit uses press-down contact probes and dedicated test harness to perform exceptionally fast, high accuracy testing. SEMILAB / SDI PV-2000A is a fully automated machine that simplifies the inspection process and significantly increases throughput with minimal manual intervention. The standalone tool is fully compatible with many types of wafer fabrication equipment, such as resist spinner, plasma etcher, and injection moulding.
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