Used SONY IRG-12 #293665056 for sale

SONY IRG-12
Manufacturer
SONY
Model
IRG-12
ID: 293665056
Defect inspection system.
SONY IRG-12 is a mask and wafer inspection equipment for production of integrated circuits. It is designed to provide automated, accurate and detailed inspection of high-resolution patterned masks and wafers used in production of integrated circuits. The system combines a number of advanced technologies such as high-magnification scanning electron microscope (SEM), optical defect inspection (ODI), automatic defect classification (ADC) and sub-micron resolution imaging. IRG-12 unit uses a scanning electron microscope (SEM) with a high-magnification electron optical scan lens to obtain images of masks and wafers with up to 1,000x magnification. The machine uses a wide range of imaging modes such as secondary electron imaging (SEI), secondary electron emission microscopy (SEEM), imaging with x-rays and scanning tunneling microscopy (STM) to enable greater resolution and to detect surface defects. In addition to SEM imaging, SONY IRG-12 tool also includes optical defect inspection (ODI) to detect defected locations and dimensions of masks and wafers. The asset employs advanced algorithms and automated image processing techniques to detect defects in fine-line patterns and to detect precision shapes and angles for defects down to sub-micron levels. To further enhance the accuracy and speed of inspection, IRG-12 model includes automated defect classification (ADC) to identify and classify defects. Using a deep learning-based defect classifier, the equipment is capable of distinguishing from various physical defect types and providing detailed metric results of partition inspection. SONY IRG-12 system also includes sub-micron resolution imaging for high-resolution verification of masks and wafers. Its high-resolution electron detectors enable imaging of subtle surface structure at advanced levels of detail. The unit also provides precision image processing and pattern matching tools to accurately identify subtle patterns over large area. To ensure consistent and accurate inspection results, IRG-12 machine is equipped with advanced quality control tools. The tool automatically performs temperate monitoring to guarantee stable imaging conditions and provides periodic preventive maintenance operations for maintenance-free operation. In conclusion, SONY IRG-12 is a highly advanced inspection asset ideal for production of integrated circuits. Its advanced features and automated systems provide reliable and accurate results for masks and wafers at ultra-high resolution.
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