Used ZYGO GPI XP #293757767 for sale
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ID: 293757767
Wafer Size: 4"
Interferometer, 4"
DELL PC
Operating system: Windows 2000.
ZYGO GPI XP is a high-performance, full-featured mask and wafer inspection equipment designed to meet the demanding requirements of today's semiconductor industry. It offers advanced features such as fully automated inspection, defect classification and identification, 2D defect classification and 3D defect quantification. This system is capable of detecting defects down to 200nm across the entire wafer including mask & shadow images. At the heart of the unit is a full-color programmable microscope that provides increased light intensity, accuracy and tighter control of the focus. This optical microscope is accompanied by an integrated machine of process control and data analysis software. An embedded software layer simplifies the tool by providing easier user interface and easy operation. ZYGO GPIXP comes with a variety of automated process steps such as alignment, defect detection and classification. The image processing algorithms are designed for fast yet accurate identification of multiple types of defects. Advanced features include the ability to detect interconnect lines, 3D features, and macro features. GPI-XP also features advanced classification algorithms capable of separating expressed defect types into their respective categories. A process summary tool provides quick comparison between multiple analysis runs, allowing a greater range of comparisions in terms of both defect type and size. In addition to its sophisticated defect detection and classification capabilities, GPI XP also includes modules for field-measurement, defect density measurement and signal verification. It also includes an automatic focus-tracking feature for improved measurement accuracy and greater image quality. In conclusion, GPIXP is an advanced and modular mask and wafer inspection asset that offers a comprehensive collection of features and sophisticated algorithms to ensure the production of high quality products. Its optical and software systems are designed to minimize false defect detection while maximizing throughput and process accuracy. Whether it is used for mask or wafer inspection, ZYGO GPI-XP offers the flexibility and reliability to complete virtually any inspection task.
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