Used ZYGO KMS450i #9356951 for sale
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ID: 9356951
Vintage: 1999
Inspection system, parts machine
060-00010-01 Controller
Stage
PCB
Missing parts:
Objectives
Control modules
XYZ Drivers
Hard Disk Drive (HDD)
Camera
1999 vintage.
ZYGO KMS450i is a state-of-the-art mask & wafer inspection equipment designed to deliver high-precision mask & wafer inspection with a seamless user experience. The system is built on a proven inspection platform with ZYGO proprietary software tools to enable fast, accurate mask & wafer verification. ZYGO KMS 450I offers superior image capture and reticle inspection performance, allowing users to identify and inspect mask flaws quickly and accurately. It also features a patented high-resolution optical scanning unit (HOS) capable of capturing images with a minimum pixel size of 0.5 μm, ensuring superior pattern fidelity on the images captured. Additionally, the machine is equipped with advanced algorithms for image sharpening and filtering to reduce noise and artifacts in the inspection image, greatly improving accuracy of defect detection. The tool supports a wide range of mask inspection applications, from small features for ICs to larger features for Flat Panel Displays (FPDs). KMS450i is fully automated and can inspect a large variety of masks, such as LCD, OLED, MEMS or CIS, at high speeds. The asset also offers quick wafer inspection with its sophisticated pattern recognition and shape selection capabilities to accurately detect wafer flaws. Furthermore, edge/span inspection allows detection of edge and span errors on the masks which could otherwise lead to costly rework. These features of KMS 450I provide a comprehensive and accurate wafer and mask inspection solution. With a quick learning curve, it is easy to set up, operate and maintain. Furthermore, the model's flexible interface and support for a range of customization options allow rapid implementation of new inspection measurements. Overall, ZYGO KMS450i is a robust, reliable and cost-effective solution for wafer and mask inspection.
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