Used ZYGO Mark III #76467 for sale
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ID: 76467
Interferometer
Zoom 1x - 6x
Remote control for Zoom, Focus, fast switching between Align and View mode
Aperture 4" (102mm)
Including 4" Phase Shifter from Zygo
Including high voltage amplifier from ASTRO ELECTRONIC, built into the MK-III
Line voltage: 120V or 230V
For interferogram analysis: IntelliWave Software from Engineering Synthesis Design, Inc. is recommended (not included)
The original Vidicon camera has been replaced by a modern CCD camera, it's a SONY XC-ST51CE:
Vertical 50 Hz, horizontal 15625 Hz, alternatively a 60Hz camera is possible too
Transmission sphere is not included.
ZYGO Mark III is a high-precision metrology tool that offers unparalleled precision and accuracy in wafer and mask inspection. It is an optical, non-contact imaging equipment that is used to measure microscopic features on wafers, masks, photomasks, and other substrates. The system features a high-quality optical design, a high-performance imaging unit, and advanced software algorithms. Mark III is based on a unique imaging architecture which combines an optical lens and a diffractive optical element (DOE). These components provide a high-resolution image with low distortion and effectively eliminate the chromatic aberration found in traditional lens designs. The imaging machine is designed to capture highly-detailed images of various substrate materials. It can detect very small particles, measure surface roughness, and quantify light scattering characteristics. It also has a wide range of detection capabilities, such as detecting various kind of particles including dust, ions, molecules, and thin films. The wafer and mask inspection software algorithm allows users to quickly detect defects, optimize their processes, and identify undesirable features that may not be visible to the naked eye. ZYGO Mark III utilizes digital signal processing (DSP) technology and offers excellent stability and accuracy in measurement. It has a real time 128 point phase compensation tool and a advanced noise rejection (ANR) algorithm. Both of these features ensure precision and accuracy in measurement and provide a more precise image. The asset also offers a number of user-friendly features such as automatic focus, auto leveling, and on-screen calibration. Mark III is an advanced model that provides highly precise and accurate measurements. It can be utilized to quickly detect defects and optimizes processes in various inspection applications. With its state-of-the-art optical design, high-performance optical imaging, advanced software algorithms, and precise measurements, ZYGO Mark III is an extremely reliable and accurate wafer and mask inspection equipment.
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