Used ZYGO MicroLUPI #9280679 for sale
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ID: 9280679
Interferometer
Worktable
Vibration isolation table
Laser power supply
Motor driver assembly
X/Y stage
Motion controller
Power manager.
ZYGO MicroLUPI - Mask and Wafer Inspection Equipment is a breakthrough in high-resolution mask and wafer inspection technology. It provides unmatched accuracy in defect detection and repair with direct visualization of microscopic defects on any size or type of mask or wafer. The system can detect defects down to less than 1 nanometer in size and allow the operator to quickly and accurately identify and locate each defect. MicroLUPI unit consists of advanced hardware and software components that allow for fast and accurate pre-testing and analysis of the wafer or mask. This includes advanced optics, automated pattern recognition algorithms, and special-purpose software. The software can provide a virtual representation of the mask or wafer, allowing the user to visualize the defects in 3D. This combination of technology enables the user to detect even the smallest, most challenging defects. The machine utilizes patented image magnification hardware and software to analyze masks or wafers at multiple levels. The user can adjust the magnification up to 15,000x to clearly identify and locate defects. The tool captures up to 800 images of the patterned area in just a few seconds, so that the user can quickly acquire a detailed view of the entire mask or wafer. The asset can simultaneously detect topological and dimensional defects, enabling the user to discern differences in topology and thickness of the material. ZYGO MicroLUPI's sophisticated inspection algorithm is designed to automatically identify and quantify each defect. This process employs specialized optics, sophisticated image recognition software, and a powerful pattern recognition algorithm, enabling the operator to detect and classify unique defects. This data is then stored for further analysis or can be used to instantly repair defects. Overall, MicroLUPI is a powerful and highly accurate mask and wafer inspection model. It offers ultra-high resolution to detect and repair the tiniest defects, while providing a thorough analysis of the mask or wafer. This versatility allows the user to analyze both complex structures and simple patterns with ease. In all, ZYGO MicroLUPI is the perfect solution for detecting and repairing even the most difficult and smallest defects.
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