Used ZYGO Verifire AT #9222106 for sale
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ID: 9222106
Vintage: 2002
Interferometer
OS: Windows 10 64 bit
Measurement capability: Measures surface & transmitted wavefront
Measurement techniques: Vibration tolerant phase shifting interferometry
Alignment system: 2-Spot with reticle with 2° capture range
Test beam diameter: 4" (102 mm)
Optical centerline: 4.25" (108 mm)
Laser source: Un-stabilized 633 nm HeNe, Class IIIa
Camera resolution: 1000 x 1000 Pixels
Shutter speed shortest: 20µs
Digitization: 10 bits
Image resolution: 400 µm Over entire FOV (Optically limited)
Image distortion: Up to 2% over entire focusing range
Focus range: ±2 Meters
Mounting configurations: Horizontal / Vertical
Performance:
RMS Repeatability: <0.5 nm RMS 2 - With NO averaging
RMS Wavefront repeatability: <0.4 nm RMS 2 - With NO averaging
Fringe resolution / Slope: >1.5 Fringes/mm / > 150 fringes across aperture
Retrace error @ maximum fringes: 0.13 Waves
Operating environment:
Temperature: 15° to 30°C (59 to 86F)
∆T/∆t: <1.0 °C/15 min
Humidity: 5 - 95% Relative, non-condensing
Vibration isolation: Isolation system recommended for PSI
2002 vintage.
ZYGO Verifire AT is an advanced tool for mask and wafer inspection. It provides high performance analysis of transparent and reflective surfaces such as wafers, masks and other flat specimens. Verifire AT is the product of the intersection of precision engineering, leading-edge optics, and advanced control systems. It has an intuitive user interface which allows for easy operation for both novice and advanced operators. At its core, ZYGO Verifire AT is a combined optical imaging equipment and automated inspection controller. Its central optical imaging system employs a patented high-pressure air-bearing microscope, which provides sub-micron resolution of specimens up to 220mm in diameter. This microscope utilizes two independent axes to provide stereo imaging which generally produces greater precision and a more accurate image than traditional optical microscopes. Since stereo imaging requires two separate images, Verifire AT utilizes a patented dual barretter unit which eliminates the need for image stitching. The automated inspection controller allows for full automation of the inspection process. Specifically, ZYGO Verifire AT offers automated step & repeat, post-processing, and calibration functions. Automated step & repeat allows the user to quickly and accurately capture a series of images of the sample. Post-processing features include contrast optimization and automatic defect detection, both of which are greatly simplified by the use of the dual-barretter effect. Finally, Verifire AT provides several fully-automated calibration tools to ensure that images are properly scaled, aligned, and focused. ZYGO Verifire AT also features a highly accurate micrometer measuring machine for those who need to measure detailed features of their sample. This micrometer tool is integrated directly into the user interface, providing fast measurements and accurate results. Finally, Verifire AT is designed to be scalable. It can be easily adapted to fit the needs of individual users. Its modular design allows for easy customization and upgradeability by allowing user to purchase and install only the components they need. ZYGO Verifire AT is a versatile and reliable mask and wafer inspection asset. It is capable of providing precise imaging and thorough inspections with minimal effort. With its easy-to-use interface, scalability, and accurate measuring model, Verifire AT is the perfect tool for any inspection lab.
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