Used NIKON MX-61 #9150938 for sale

NIKON MX-61
Manufacturer
NIKON
Model
MX-61
ID: 9150938
Automatic inspection system.
NIKON MX-61 is a high throughput wafer stepper. It is ideal for large scale production, especially in the semiconductor industry where precise photolithography is needed. MX-61 can reliably handle up to six-inch wafers, and has excellent image quality with a positional accuracy of 3.2 microns. It is capable of high-end exposure with its extremely high resolution, from 0.75 micron up to 0.10 micron. Throughput is also maximized with its optimized scan vector design. NIKON MX-61 also has a patented F-Theta Lens that maintains excellent image quality throughout the scan field. This keeps unwanted distortions at bay and allows for a precise field correction. It also offers precise control of focus and astigmatism, even during production. In terms of operations, MX-61 supports precise tracking of the wafer's position and rotation with its motorized linear stage. This prevents uneven exposure and allows for precise layer-to-layer alignment. Additionally, NIKON MX-61 supports remote monitoring with its diagnostic software for predictive maintenance. In terms of maintenance, MX-61 has a dust-proof enclosure and offers high quality air filters for long term use. Its air bearing design also minimizes applied force and ensures minimal friction, allowing for low power consumption. Furthermore, it has a CCD imaging system that allows for manual inspection with total magnification up to 10 times. NIKON MX-61 is, all in all, a high quality wafer stepper that provides precise photolithography for large scale production. With its advanced technology and features, it is an ideal choice for the semiconductor industry and other related industries.
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