Used VEECO Contour GT-X3 #9248833 for sale
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ID: 9248833
Wafer Size: 8"-12"
Vintage: 2011
3D Optical microscope, 8"-12"
Manually loaded
X,Y Stage: 12" x 12"
Field of view: 0.5 mm to 2.0 mm
Auto tip tilt stage
(4) Motorized position turrets
Maximum scan range: Up to 10 mm
PC
Operating system: Windows 7
Vertical resolution:
0.05 nm (Motor)
0.01 nm (PZT)
RMS Repeatability:
0.01 nm (Motor)
0.004 nm (PZT)
Lateral resolution:
0.38 μm Minimum (Sparrow criterion)
0.13 μm (With AcuityXR)
0.01 μm (With NanoLens)
Step height accuracy: <0.75%
Step height repeatability: <0.1% 1 Sigma repeatability
Maximum scan speed: 114μm / sec (With standard camera)
Sample reflectivity: 0.05% - 100%
Maximum sample slope
Shiny surfaces: Up to 40°
Rough surfaces: Up to 87°
XY Sample stage: 8" Automated
Encoders: 0.5 μm
Z Focusing, 4" Automated
Tip / Tilt function: ±6° Automated
Computer-controlled tip / Tilt head
Optical metrology module:
Patented dual-LED illumination
Single-objective adapter
Optional automated or manual turret
Objectives:
Parfocal: 2.5x, 5x, 10x, 20x, 50x, 115x
LWD: 1.5x, 2x, 5x, 10x
TTM: 2x, 5x, 10x, 20x
Bright field: 2.5x, 5x, 10x, 50x
Zoom lenses: 0.55x, 0.75x, 1x, 1.5x, 2x Auto-sensing modules
Camera:
Standard monochrome: 640 x 480
High-resolution monochrome (Option): 1392 x 1040
Color (Option): 640 x 480
XY Automation:
Automated stitching scatter and grid automation
Calibration via traceable step standard
2011 vintage.
VEECO Contour GT-X3 is an advanced, automated scanning electron microscope (SEM) designed to provide users with superior imaging performance. It utilizes a combination of high voltage electron energy, a multi-axis, automated sample stage scanning, and meticulous alignment of the microscope components as three main components that make up the SEM's technology. Its primary application is in the investigation of surface features on the nanometer scale with high resolution imaging capability. The main components of Contour GT-X3 are the electron optical column, the sample stage, and the sample holder. The electron optical column includes focused electron optics and gun, the glass envelope of the column, and the immersion lens. The sample stage consists of a 3-axis, automated sample motion, with a range of ±20mm in X, Y, and Z axes. This sample stage includes the secondary and tertiary electron detectors, which enables high-resolution imaging of sample features. The sample holder is designed to accommodate a variety of sample media including wafers, glass slides, and other materials. In addition to its electron optics column and sample stage, VEECO Contour GT-X3 includes a dedicated control and acquisition system for precise alignment of the electron beam and automated image acquisition. The control and acquisition system further enhances the imaging capabilities of the microscope by controlling the sample movement, detector measurements, data acquisition, software features, and remote control of the microscope. Contour GT-X3 allows users to access a wide range of features such as automated image registration, advanced histopathology, and scanning optics alignment. Additionally, the instrument can perform automated and precise measurements with the possibility of real-time image processing and analysis. Furthermore, the microscope offers an innovative feature for high speed video imaging of samples, providing researchers with the option of fully automated imaging of samples or remotely controlling the operation of the microscope in macro and microscale. In conclusion, VEECO Contour GT-X3 is an advanced, automated scanning electron microscope (SEM) that is designed to provide users with superior imaging performance. It incorporates a range of features for end-user versatility and flexibility, and offers advanced features such as automated image registration, advanced histopathology, and scanning optics alignment. Contour GT-X3 is the perfect tool for any researcher or engineer that requires a reliable imaging system to acquire high-resolution images on the nanometer scale.
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