Used VEECO / DEKTAK Dimension X3D #9375522 for sale
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VEECO / DEKTAK Dimension X3D is a full-featured laboratory microscope designed for precision semiconductor metrology. It combines optical and scanning electron microscope (SEM) capabilities, 3D imaging, highly efficient low vacuum and high vacuum modes, and automated mapping. Its integrated system allows for in-depth analysis of structures throughout an entire wafer, as well as on-line sample preparation and inspection. This makes it especially well-suited for determining problems with structures at the micron and nanometer levels. The system uses high-precision optics and high-speed scanning stages, as well as an advanced reflectron path to detect secondary electrons or cutting edges and obtain sub-nanometer resolution. The imaging is optimized by the use of demagnifying optics and low power objective lenses that can allow all surfaces of a semiconductor sample to be imaged or investigated in 3D. Additionally, the X3D includes a unique low voltage view technique so that the sample can be viewed down to the 3 nm resolution. For automated sample mapping, the X3D uses a special technique called Photon-Excited Secondary Electron Emission (PSEE) to detect the morphology of the sample. PSEE allows for mapping of the topography of the sample faster than traditional methods, such as topographical imaging. Additionally, the X3D has been improved to reduce the quantity of generated secondary electrons, as well as to give smoother images. The X3D also includes a comprehensive suite of software that can be used to control the microscope, analyze images, and even record and analyze data. The software can be used to display images and automatically create measurement reports, as well as to determine the presence of faults and defects in the sample, as well as other features of interest. Additionally, the software includes tools for defect size and shape discrimination, as well as defect analysis techniques. The X3D is controllable from a single workstation and can be interfaced with automated systems, such as trial machines. This makes the X3D an ideal choice for rapid metrology and process control applications. The X3D is a powerful and versatile tool for semiconductor metrology, offering users superior performance, durability, and automation capabilities. The X3D combined with the expertise and support of VEECO and DEKTAK makes it the ideal choice for any high-precision semiconductor metrology application.
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