Used ADT 977 #293621315 for sale

ADT 977 Wafer Processing Equipment is a high-performance, automated system specifically designed to transport and process wafers of varying sizes and thickness. The unit is composed of a gantry-style transport machine, a quiescent bonnet, a loadlock, multiple process chambers and a load port chamber. The transport tool is driven by a combination of xy-table drive and linear motor technology, allowing precise control over substrate positioning and precise, rapid movement of substrates from chamber-to-chamber. The quiescent bonnet houses a gas distribution network with multiple mass flow controllers for precise control of the process and cleaning gases. A high-performance wafer chuck is integrated into the asset, and a choice of vacuum or atmospheric chucking can be specified based on the application. The heated loadlock, designed with crystallized graphite corners, features both a manual selector valve and an automated gate valve for precise control and rapid switching of the pressure in the chamber. The chambers of 977 are highly configurable, capable of performing a variety of different processes, including deposition, etching, lift-off, oxidation, implantation and cleaning. The process modules can all be interfaced to the main control model, allowing for accurate setting of pressure, temperature, and other parameters. The load port chamber is equipped with a clean, automatically controlled transfer port, providing controlled access to the process chambers. ADT 977 also includes video-monitoring, an automated recipe capability, and a comprehensive user interface, allowing for easy and intuitive operation of the processes. In addition, the equipment has an emergency stop button, global shut-off capability, interlock switches and integrated safety features designed to offer optimal protection against unexpected incidents and potential accidents. 977 Wafer Processing System offers a cost-effective solution for the automated handling, transport and processing of wafers. It is a reliable, easy-to-use unit, suitable for a wide range of applications in the microelectronics industry.