Used AIT VRS-150 #293648374 for sale
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AIT VRS-150 is an advanced other wafer processing equipment designed for high volume projects with sub-micron precision. The system is designed for handling wafers of up to 150mm diameter and can handle a variety of materials, including silicon and organic materials. The unit utilizes a multi-axis robotic positioning machine, which provides an XYZ positioning accuracy of ±1.5 μm moving over a total range of 45mm x 45mm x 10mm. This ensures precise placement of each wafer and ensures consistent processing results. The tool includes an integrated vision asset, capable of detecting and locating fine geometric features as small as 6μm. This allows for both high accuracy and ultrafast rate processing. In addition, the model is designed for easy integration with other wafer processing systems. VRS-150 utilizes fine machine components to ensure robust and reliable performance. The equipment consists of two main sections. The first section is the main prober, which is designed for automated wafer handling and placement. This section is equipped with a vacuum line for assistance in wafer loading and unloading. The second section is the passivation chamber where the wafers undergo cleaning, oxidation and other treatment processes. AIT VRS-150 features an automatic vacuum system, which allows for a controlled amount of vacuum force during each step in the process. It also includes a 'nozzle-eject' unit, which ensures complete wafer removal after each process step. It also has easily adjustable process parameters to accommodate different materials and applications. The machine features a range of sensors and safety features to reduce operator errors, increase throughput and extend tool lifetime. Many of the components are compact, making the asset ideal for low-cost, high-throughput wafer processing. The model has easily adjustable light sources to suit a range of wafer sizes and thicknesses with a automated cleaning equipment for both the robot and prober stages. In addition, the system is designed to operate in a controlled atmosphere in harsh conditions to ensure consistent results. VRS-150 is an advanced other wafer processing unit with many features designed to ensure high accuracies in high-volume applications. Its multi-axis robot and integrated vision capabilities provide sub micron precision, while the vacuum machine and nozzles provide automated wafer handling. The tool is designed for low cost and extended lifetime. Moreover, the range of sensors and safety features provides an easy to use, safe and reliable asset.
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