Used AIT VRS-150 #293648375 for sale

AIT VRS-150 is a fully automated wafer processing equipment designed for performing single and multi-pass processes for SiC-SiO2, Si LPCVD and polysilicon deposition, as well as etching and stripping. Its advanced software-controlled processes are capable of achieving superior deposition and etch uniformity with minimal batch-to-batch variations. The system is equipped with a multi-station pre-aligner, wafer lifter, and wafer pre-aligner to ensure precision handling of the wafers. Furthermore, the unit includes several vacuum chamber doors, each of which is interlocked with the main machine door, providing additional safety and a redundant process. The tool is integrated with three individual load locks, each supporting up to 150mm wafers, which allows for single and multi-pass processes. Furthermore, the asset features a high resolution He beam current monitor for precise control over the PECVD process. VRS-150 is designed with a critical process control which helps reduce yield loss induced from process variability. It is integrated with multiple pressure sensors, temperature sensors, and a quartz crystal RF controller. In addition, the model includes a four-zone susceptor lift and a susceptor tilt control to ensure high uniformity of the deposited film. To ensure safe operation of the equipment, AIT VRS-150 is equipped with a number of safety features such as an emergency stop button, a gas safety cutoff and a gas safety reset. Furthermore, the system is designed with a gas monitoring unit for process safety and hazardous gas monitoring, allowing for safer operations in critical processing environments. Overall, VRS-150 is a robust and reliable wafer processing unit that can provide reliable single and multi-pass processes for SiC-SiO2, Si LPCVD and polysilicon deposition, as well as etching and stripping.