Used AKT / MKS Astron HF #293608419 for sale

AKT / MKS Astron HF is a high-end wafer processing equipment and one of the leading tools for creating a variety of wafer-based products. This system provides a fully automated process for wafers of all sizes and thicknesses in applications such as high-temperature oxidation, epitaxial growth, and device fabrication. The unit offers computer-controlled, high-precision, and repeatable processing conditions with rapid cycle times and improves throughput by up to 30%. AKT Astron HF is designed to expand wafer process capabilities by providing an integrated environment for automated process steps and complex operational parameters. The machine is equipped with options that include rapid annealing, variable pumping rate, full flow control, and rapid pressure stabilization. Additionally, it features pre-heating and cooling to the desired temperature within a range of 250 - 800 °C allowing for improved oxide formation rates. The tool's digital boards are fitted with PID controllers to provide full control over temperature and pressure. Furthermore, this asset can be integrated with other devices like ICP tools for a greater degree of controllability, accuracy, and repeatability of the wafer processing. MKS Astron HF incorporates a wafer handling model for transferring wafers between the process chamber and the load-lock chamber, allowing for safe and secure loading, unloading, and handling. It also includes a programmable automatic end-point recognition equipment, providing full flexibility. Furthermore, this system's safety features include pressure interlocks and over-temperature protection. It also has an in-situ cleaning capability that can be set up to clean each wafer individually, reducing the risk of contamination. The unit also supports a range of recipe formats and allows the operator to control both the process parameters and flow control variables. Additionally, the data generated by the machine can be used to track and monitor the process conditions and cycle times. Overall, Astron HF provides all the features and capabilities needed to handle wafers for a wide range of wafer-based processes. This tool offers enhanced temperature performance and accuracy with an improved process throughput, ensuring reliable and repeatable results. It is an ideal choice for engineers and researchers who need efficient and highly controllable wafer processing solutions.