Used AQUEOUS TECH AQ 300 #9165985 for sale

AQUEOUS TECH AQ 300 is an advanced other wafer processing equipment designed specifically for researchers and engineers in the semiconductor industry. The system is designed for in-situ and rapid thermal processes in a closed environment. AQ 300 offers versatile solution for various deposition processes, wafer cleaning, and resist coating. AQUEOUS TECH AQ 300 is capable of handling wafers up to 300mm diameter and offers a maximum chamber temperature of 1100°C. For clean-up and cleaning applications, AQ 300 features a 6-gas mixing unit that can provide nitrogen, oxygen, argon, hydrogen, helium, and xenon. For deposition applications the machine includes versatile hardware for growth of various materials such as amorphous carbon, niobium, titanium nitride, aluminum nitride, and silicon nitride. AQUEOUS TECH AQ 300 is compatible with several software platforms, including MACThermalX, MACThermalGrowthManager, MACThermalTR, and MACThermalSC for temperature, rate, and other process control accuracy. The device features three independent process chambers; an upper chamber for deposition, a lower chamber for degassing and cleaning, and an independent sample chamber for wafer chucking. Each chamber is equipped with a high-precision quartz shutter valve and a pressure sensor to monitor pressures from 10^-2 to 10^-5 torr. For improved plant and process automation, AQ 300 integrates with digital process controllers, automation controllers, and safety systems. It boasts a wide range of versatile embedded sensors and control systems for monitoring the process parameters such as temperature, pressure, gas content, and time. In addition, it offers an embedded TDLAS tool to maintain quality assurance. AQUEOUS TECH AQ 300 is a versatile complete asset designed specifically for sophisticated processes in the semiconductor industry. It is designed specifically for researchers and engineers in the semiconductor industry and utilizes the latest in technology for rapid thermal processing and process control accuracy. The high-end model offers industry-standard advanced technologies for improved automation and safety.