Used AQUEOUS TECH Trident XLD DUO #9296611 for sale

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ID: 9296611
Vintage: 2012
Batch cleaner Chamber 1: 3216 Cycles Chamber 2: 5237 Cycles Water soluble (2) Exhaust stacks Does not include rinse water recycler 2012 vintage.
AQUEOUS TECH Trident XLD DUO is an advanced, state-of-the-art "Other Wafer Processing" equipment for accurately and rapidly processing compound semiconductor wafers and MEMS devices. Trident XLD DUO offers unprecedented control over the entire fabrication process and helps to ensure consistent layer deposition and device patterning. The Trinity XLD Duo system includes a multi-chamber process chamber, a batch load-unload unit, and a Laser-Directed Crystallization (LDC) machine. The process chamber can precisely control substrate temperature, vacuum, pressure, and atmosphere. It uses resistive and capacitive heating systems to precisely control substrate temperature and operate repeatably over a range of conditions. The batch load-unload tool uses a robotic arm to quickly and accurately load and unload wafers and MEMS devices during fabrication. It also uses a proprietary Optical Sensor Asset to detect different types of wafers and MEMS devices on the platform, ensuring highly accurate operation. The LDC model uses an integrated laser equipment to enable precise crystallization of thin layers over a wide range of temperatures. The crystallization can be targeted to specific portions of the wafer, enabling complex patterns to be created in a faster and more efficient manner. The laser system also allows for feedback control, ensuring consistent results across multiple cycles of wafer processing. The Laser-Directed Crystallization unit, combined with the process chamber's control over the environment, allows for extremely accurate layer deposition and pattern formation. AQUEOUS TECH Trident XLD DUO offers improved ease-of-use over previous systems, providing an intuitive user interface as well as automated process control and automated device identification. The machine also offers an improved cost of ownership, due to its advanced technologies and smaller footprint. Finally, Trident XLD DUO provides reliable, repeatable processing, enabling users to quickly and reliably fabricate high-quality compound semiconductor and MEMS devices.
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