Used AQUEOUS TECH Trident XLD #9258638 for sale

AQUEOUS TECH Trident XLD
ID: 9258638
Batch cleaner.
AQUEOUS TECH Trident XLD is an advanced wafer processing equipment designed for back-end semiconductor manufacturing and selective deposition applications. It offers a unique combination of technologies designed to maximize throughput, reduce contamination risk, and manage the process environment. Trident XLD is built on an advanced modular platform that is designed for maximum flexibility and scalability. The platform consists of three main elements: the wafer handling system, the deposition chamber, and the cleaning subsystem. The wafer handling unit reliably transfers wafers from the input to the output modules while keeping them within the required quality levels. The deposition chamber is designed to provide a precise, reproducible thermal environment for selective deposition applications. The cleaning subsystem includes a low-risk, contamination-free, plasma-based process to clean and remove particles. AQUEOUS TECH Trident XLD also features a closed-loop process control machine, capable of controlling up to eight axes with precision accuracy. This tool provides the user with powerful wafer-processing recipes and the ability to quickly modify parameters within the recipes. The closed-loop process control asset enables highly accurate layer thickness control, optimal layer uniformity, and allows for quick recipe changeover and recipe optimization. The deposition chamber is designed with a dual chamber arrangement for increased stability and temperature uniformity across the wafers. The chambers are optimized for serial double-sided wafer stacking and efficient diffusion reactor access. The model also features a water recirculation equipment to efficiently cool the process, improve yields, and extend tool life. In addition to its advanced technology, Trident XLD features a user-friendly graphical user interface (GUI) that allows for easy recipe creation and selection. The GUI provides users with detailed process information, along with comprehensive fault diagnosis and correction tools. This system helps operators troubleshoot and optimize process recipes to improve tool performance and yields. AQUEOUS TECH Trident XLD offers a powerful, robust, and reliable solution for back-end semiconductor manufacturing and selective deposition applications. With its advanced features, modular platform, closed loop process control unit, and easy to use graphical user interface, this machine is an ideal choice for manufacturers looking to optimize their production processes.
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