Used ASAHI SUNAC AF5400SC #9390976 for sale

ASAHI SUNAC AF5400SC
ID: 9390976
Micro jet cleaning system.
ASAHI SUNAC AF5400SC is a high-performance wafer processing equipment designed for commercial and industrial applications. The system is capable of processing up to 4-inch wafers with a wide array of wafer processing capabilities, including wet etching, dry etching, spin etching, photolithography, resist stripping and other vital processes. The unit utilizes a state-of-the-art electrochemical recessed cell configuration with a 5kW, coarsely adjustable ICP (inductive coupled plasma) power supply. The machine is capable of delivering parallel, uniform plasma treatments over the wafer's full surface. Its cell also features a split flow technology to prevent cross-contamination of different gases. The chamber lid has a quick-opening mechanism, allowing easy access to the chamber, improving yield and throughput. The tool also features advanced process control and monitoring capabilities. The four-gas inlets provide stable and reproducible conditions, while an advanced in-chamber pressure adaptation asset adjusts process conditions in real-time. This enables precise and accurate process conditions, minimizing chamber contamination and minimizing the need for frequent maintenance. The model also has a range of additional sensors, including a quartz crystal microbalance, which monitors etching rates, ensuring a consistent and reproducible process. The equipment also boasts two high-efficiency DC sputter sources. These sources feature highly uniform deposition with minimal gain in film thickness on the edges, enabling the usage of smaller masks during etching processes. This further increases the precision and accuracy of the system. AF5400SC is an ideal unit for a wide range of industrial and commercial applications, delivering precise, high-precision wafer processing services. The machine is capable of tight process control, excellent yield, and high-throughput operation, while still remaining safe and convenient to use. By delivering the highest quality wafer processing capabilities, the tool is the go-to choice for many operators across many industries.
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