Used ASYS SDA #9163582 for sale
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ID: 9163582
Vintage: 2003
Wafer separation systems
Includes:
Accessories
2003 vintage.
ASYS SDA is an advanced wafer processing equipment designed to enable clean room engineering solutions both in production and research & development. This system provides reliable and efficient wafer manufacturing processes with full integration of automated workflow handling, defect detection, and immediate feedback on failure analysis. SDA unit features a multizone controlled environment chiller which monitors temperatures in both the process and coolant chambers. This ensures precise cooling and heating for optimal processing conditions. The process chamber is equipped with the latest technologies including an advanced optical coating capability to apply protective layers without masking or imaging. The coolant chamber is designed for efficient dispersal of coolant, while a unique gas delivery machine further ensures optimum contamination control. ASYS SDA tool also offers a complete set of auto-processing components, including wafer load locks, vacuum chambers, and robot handling. All of these components are coded to recognize and respond to signals from the process chamber, providing safety, accuracy, convenience, and efficiency. A wide range of inspection systems can additionally be integrated into the asset. The model is designed to provide both a comprehensive and user-friendly interface. The software enables the user to easily create, review, modify, and store process recipes. Advanced process managers allow operators to visualize the results of experiments in real time. They can also access diagnostic functions and troubleshooting information to ensure accuracy and improve productivity. Overall, SDA provides a complete production solution for wafer processing and defect analysis. It offers a highly integrated equipment for automated production, safe and reliable operation, and improved process times. The system offers a comprehensive range of features for research and development, ensuring accurate and efficient wafer manufacturing processes for both existing and new applications.
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