Used AUSTIN AMERICAN TECHNOLOGY / AAT Microjet EC #9016322 for sale
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ID: 9016322
Vintage: 2008
In-line cleaner
PLC-based control system
480 VAC, 60 Hz
Auto stop / Stand by mode
Final rinse low flow sensor and alarm
Mach II drying system
(2) Upper, (2) lower jet manifolds
15 HP blower upgrade
18" off load extension
2008 vintage.
AUSTIN AMERICAN TECHNOLOGY / AAT Microjet EC is a precision wafer processing equipment designed to be used for quick and accurate semiconductor processing. The system utilizes a unique "Jet Edge" feature, a fluid-jet unit that can precisely clean, etch, or deposit wafers without damaging them. The jet edge technology uses high-pressure oxygen or nitrogen as the driving force to achieve very accurate cleaning, etching, and depositing of the wafer. The machine is able to very accurately deposit, clean, and etch wafers without damaging their surfaces, thanks to a variable focal plane adjustment on the nozzle. AAT Microjet EC tool can handle a range of wafer sizes, from 4" to 8", and has a maximum wafer thickness of six millimeters. The asset supports the use of both nitrogen and oxygen in the jet edge process, allowing users to set the deposit rate, etch rate, and cleaning power for different tasks. The model also includes a contaminant monitor, which helps ensure that the wafer is processed cleanly, with no damage or contaminants introduced. AUSTIN AMERICAN TECHNOLOGY Microjet EC equipment has three major components: the pump, the nozzle assembly, and the control. The pump allows high pressure nitrogen and oxygen to be directed towards the nozzle. The nozzle assembly is set up with an adjustable focal plane adjustment, and can be adjusted from the control for accuracy in wafer etching and cleaning. The control includes a feeder, a controller, and an air line. The feeder acts as a supply controller, while the controller performs precise speed control and timing. The air line runs air pressure to the nozzle and controls its direction, as well as allowing for air pressure and nozzle angle testing. Microjet EC system offers an extremely accurate and efficient way to clean, etch, and deposit wafers, reducing both wafer damage and turnaround time. Its variable focal plane adjustment ensures accuracy of etching and cleaning, while the contaminant monitor ensures cleanliness. AUSTIN AMERICAN TECHNOLOGY / AAT Microjet EC is a great solution for any semiconductor product requiring precise processing.
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