Used BUEHLER 60-2499 #293649427 for sale

ID: 293649427
Central force drive adapter Used for VANGUARD, VECTOR and LEGACY.
BUEHLER 60-2499 is a fully automated, four-zone, thermal oxidation furnace designed for processing ultra-thin wafers and other delicate substrates. The equipment's monobloc design ensures precise temperatures and uniformity, allowing for the highest quality wafer processes. 60-2499 is designed to maximize temperature stability and precision through its precise control and advanced insulation design. The furnace is comprised of four different processing zones, each with its own separate insulated cooling chamber and exhaust chamber. The design allows for the precise control of each zone separately, ensuring consistent process conditions at all stages of fabrication. The use of advanced air-cooled insulation and an integrated cooling system helps to reduce energy consumption while increasing temperature stability. BUEHLER 60-2499 also incorporates advanced gas monitoring and process flow control sensors, ensuring constant performance and reproducibility in substrate processing. 60-2499 is capable of processing wafers up to 4" in diameter and with thicknesses between 20nm and 200nm. It features an adjustable slit height, allowing precise control of slit height within +/-2µm. BUEHLER 60-2499 also features a precise bed of sand to ensure even processing. A Furnace User Interface (FUI) is included to quickly and conveniently set parameters for substrates. 60-2499 is a high-performance thermal oxidation unit for a variety of wafer processing needs. Its precise temperature control and advanced process monitoring technologies ensure consistent and reproducible performance for any project. In addition, its air-cooled insulation design and integrated cooling machine provide excellent performance and energy efficiency. With its robust and accurate design, BUEHLER 60-2499 is an ideal tool for processors looking to achieve the highest quality wafer fabrication results.
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