Used DETREX VS-2000-EW #138705 for sale
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ID: 138705
Vapor spray degreaser
Specifications:
Stainless construction
Spray wand
Primary cooling water
Freeboard: 100+%
Sliding covers
Freeboard chiller
Triple canister filtration
Large built-in solvent catch tray holds spill
Secondary application for cleaning tubes
Eductor and nozzles fixture
Pump system installed above boiling liquid sump
Power requirements: 240V, 3-phase, 60Hz, 63A.
DETREX VS-2000-EW is a wafer processing equipment designed to meet the needs of the semiconductor and microelectronics industry. It offers accuracy, speed, and reliability to carry out a variety of complex processing tasks. The system features an intuitive touch-screen graphical user interface for easy operation and setup. VS-2000-EW utilizes a three-axis unit for precise positioning of the wafer during etch and deposition operations. The machine is also equipped with a 28-position process cassette, an advanced tool controller with remote management capabilities, and a two-stage vacuum/air filter asset for clean operation. DETREX VS-2000-EW is capable of performing both wet and dry etching processes. It is capable of controlling the etching rate and protecting the wafer from over etching. The model is equipped with an automated temperature control equipment to ensure consistent etch performance and temperature uniformity over the entire wafer surface. The system also offers a range of power and speed options to accommodate different processing needs. VS-2000-EW is capable of performing various types of deposition processes. It is equipped with a 4-zone quartz tube furnace and is capable of up to 6-zone control. The unit is also capable of repeatable and precise wafer thickness control using piezoelectricity. The vacuum chamber is designed to allow for uniform film deposition over a large area, while the quartz substrate holders ensure accurate adjustments and control. DETREX VS-2000-EW also offers a range of other features to enhance the efficiency and accuracy of wafer processing. It is equipped with an intelligent machine controller to monitor and reduce setup and cycle times, as well as a no-waste purge and cleanout tool to reduce cross contamination. The asset also utilizes computer systems to track processing parameters and performance. Taken together, the features of VS-2000-EW make it an excellent choice for a wide range of wafer processing operations.
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