Used ELMA 660H #9401119 for sale

ELMA 660H is an advanced automatic wafer processing equipment designed for comprehensive and repeatable cleaning of IC wafers. This system is a four-chamber, touchless C+S 400L module for automatic cleaning inversion of IC wafer carriers. This module is the industry standard for wafers up to 6-inch in diameter. 660H provides a full range of technologies, processes, and handling for cleaning and processing both front- and back-side mounted ICs. Featuring a totally enclosed unit with adjustable chamber chlorine concentrations, ELMA 660H offers complete process control from single-side to double-side batch processing. The chamber sizes of 660H ensures that wafers can be efficiently processed regardless of application and surface area. ELMA 660H features a wet scrub cleaning chamber, a deglaze chamber, an energetically enhanced CMP (chemical mechanical polishing) chamber, and an extended-contact cleaning and drying chamber. The wet scrub cleaning chamber is designed to remove particles and contaminants prior to CMP processing. This cleaning process removes particles and other types of contamination that might otherwise hinder the performance of the ICs. After the wet scrub cleaning, the deglaze chamber is utilized to remove any residues that may be remaining on the wafer surface. The energetically enhanced CMP chamber is equipped with an adjustable chlorine-based concentration temperature and provides a fully automated, repeatable, and programmable surface adaptation process for varying wafer diameters. This chamber is also capable for in-situ multi-level CMP of the back side of the IC. Finally, the extended-contact cleaning and drying chamber is used for a final rinse and drying of the wafer, including an additional deglazing coaters if desired. Designed for flexible production, 660H uses automated systems to load and unload carriers and provide process control. In addition, an optional ozone cleaning module can be added to the machine to further eliminate particles and residues on the wafer surface. Furthermore, the tool supports all common data tracking formats, allowing for complete traceability and process documentation. In summary, ELMA 660H is an advanced, four-chamber C+S 400L automated wafer processing asset designed for comprehensive and repeatable cleaning and processing of IC wafers. Featuring adjustable chamber chlorine concentrations and automated systems for loading and unloading carriers, 660H also supports all common data tracking formats for process traceability and documentation.