Used ELMA HS350/1100/300/6-ABS-WLT #9060500 for sale
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ID: 9060500
Vintage: 2002
Wafer cleaner
(10) Stations
Software
Manuals: installation, operation, maintenance
280V, 3 phase, 100A, 82kVA
Pneumatic power supply: 6-7 bar, 1.5Nm3/H
2002 vintage.
ELMA HS350/1100/300/6-ABS-WLT is a wafer processing equipment specifically designed for coating delicate wafers, such as those made from aluminum, gallium arsenide, oxide, and silicon comprising a variety of different layers for the purpose of integrated circuitry, MEMs, optoelectronics and other applications. This machine balances substrates and wafers by spinning using a patented angular bearing technology which removes non-uniformity and voids on the surface of the wafer. This enables maximum coating thickness with uniformity, improving process and cost efficiency. Using a dispense coating head with optional additional heads and custom-made adaptations such as mask positioning, ELMA HS350/1100/300/6-ABS-WLT is capable of performing a variety of tasks including conformal coating, flux coating, thin film deposition, and nano-coatings with a high degree of accuracy and control. Additionally, the system offers cost savings thanks to its short coating length, high acceleration and deceleration, and cooling techniques to maintain the quality of the wafer, preventing overheating or oxidation during the processing. ELMA HS350/1100/300/6-ABS-WLT is also equipped with both inline metrology and 3D imaging systems to detect deformation and defect in the wafer. Eliminating any defects during the process, the unit can ensure a high yield and product uniformity. It also supports for real-time data and monitoring of process metrics such as throughput rate, cycle time, and defect rates to empower precision and enable online process optimization. The operator can also be provided with alarms and triggers during the process and regulatory compliance with traceability and recording process history. Moreover, the machine incorporates unique features such as an advanced connectivity platform and up to 8 substrates are compatible with the tool at one time. All these features are designed to improve efficiency and quality of wafer coating critical applications. Overall, ELMA HS350/1100/300/6-ABS-WLT is an advanced wafer processing asset that offers precise and high-quality wafer coating capabilities that meet the highest standards in the industry. It is user-friendly, economical, and capable of satisfying the most exacting and challenging requirements.
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