Used ELMA X-tra Line 800 #293605217 for sale
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ID: 293605217
Ultrasonic cleaner
Substrates, 10"
Automatic basket transportation system.
ELMA X-tra Line 800 is an 'Other Wafer Processing' equipment that is suitable for ultra-high vacuum and high temperature pre/post cleans. It is an automated, single-wafer-processing platform which is designed to process wafers that range in size from 150mm to 300mm diameter. This system is equipped with a powerful Brushless Power Supply, controlling the cleaning parameters such as high-pressure spraying and brush-processing ability. It also features high-pressure plasma capability and substrate-storage capability. The unit can process the wafers using etch, deposition, or cleaning processes. Its two 300mm-wide process chambers feature high-pressure spray, brush-processing and other abilities. The machine is equipped with a controller which is capable of rapid response during the pre- and post-cleaning processes. The tool includes a high-speed scanning head that is capable of performing moving inspections. It also has an optical microscope to inspect samples during the pre- and post-cleaning processes. The asset is equipped with an ergonomically designed microposition model for precise wafer placement and positioning. X-tra Line 800 can perform multiple processing steps in one single cycle. It is equipped with Advanced Wafer Inspection Equipment (AWIS) and Automated Stage Motion Control (ASMC) for increased process and wafer control. The system is designed for easy maintenance, containing components such as heaters, needles, solenoids, and filters that are easy to change and replace. In addition, the unit is highly efficient due to its modular design, providing capacity and flexibility for a wide variety of processes. The machine is equipped with a flexible process monitoring tool that provides real-time data and trend analysis. Overall, ELMA X-tra Line 800 is an automated, single-wafer-processing platform that offers high-speed scan and process capabilities, as well as advanced wafer inspection and automated stage motion control. It is suitable for ultra-high vacuum and high temperature pre/post cleans and features powerful brushless power supply, high-pressure spray, and brush-processing abilities. The asset is designed for easy maintenance, with components such as heaters, needles, solenoids, and filters that are easy to change and replace.
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