Used ENTEGRIS Ultra-6102 #9156643 for sale

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ID: 9156643
Vintage: 2004
FOUP Cleaning system Return conveyor (1) Spray wash / rinse chamber (2) Dynamic dry chamber Stored in clean room 2004 vintage.
ENTEGRIS Ultra-6102 is a fully automated wafer processing equipment designed to quickly and accurately process a wide variety of wafer sizes and types. It is capable of processing up to 300mm wafers and is capable of high volume, high throughput processing. The system has been designed for top-notch precision and accuracy, making it suitable for a variety of applications, from research applications in a laboratory environment toindustrial production processing. Ultra-6102 consists of a wafer loader, wafer handler, process head and spinner assembly. The wafer loader is a vacuum driven unit that can accommodate up to 25 wafers at a time. The handler component has a multi-camera machine that is able to detect and accurately position the wafers ready for processing. The process head is equipped with multiple tools for physical and chemical processing. Each tool is independently programmable, enabling precise etching and deposition of materials. The spinner assembly is also adjustable and can quickly and accurately spin wafers up to 22,000rpm. The entire tool is mounted on a mobile platform, allowing it to be easily moved between production lines or locations. Optionally, the asset can be equipped with an in-sysytem performance monitor to track efficiency and output. ENTEGRIS Ultra-6102 is a state-of-the-art wafer processing model, capable of providing precise and accurate processing cycles on a wide range of wafer sizes. It is ideal for scientific laboratories and industrial production lines where accuracy and efficiency are of paramount importance. The equipment is easily movable, making it incredibly versatile and providing unprecedented levels of flexibility.
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