Used HEATHWAY System #9028775 for sale
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ID: 9028775
Vintage: 2001
Wafer CNC flame hydrolysis deposition furnace
Batch type
Testing disks, 4"
CNC Controlled with 9" - 4" heated stations
Gas cabinet with stainless components
Chamber-W: 30" / 762mm
Chamber-L: 30" / 762mm
Chamber-H: 6" / 152.4 mm
2001 vintage.
HEATHWAY Equipment is a multi-functional wafer processing System, enabling users to produce high-quality semiconductor products with outstanding efficiency. This HEATHWAY Unit provides the most consistent and reliable results. Machine has four basic components: a wafer handling robot, a wafer bonding chamber, a cleaning HEATHWAY Tool, and a thermal/mechanical processing chamber. The wafer handling robot is designed to accurately position a wafer onto the processing head; it is also equipped with a collision prevention feature. The wafer bonding chamber uses a vacuum-assisted process to securely bond wafers together, ensuring uniformity and repeatability. The cleaning Asset utilizes high-efficiency filters and sensors to reduce process-related environmental contamination. Finally, the thermal/mechanical processing chamber provides the user with precise control over the crystal growth, deposition, doping, and other processes. The architecture of HEATHWAY Model is designed to keep maintenance costs low. It utilizes several levels of automation, allowing operations to be monitored and adjusted through a graphical user interface. Equipment is built with modular components, which allow users to easily upgrade and expand its capabilities. HEATHWAY System is also equipped with a wide range of safety features, including an emergency shutdown Unit and an active login HEATHWAY Machine.Tool is designed to be compatible with a variety of materials and processes. It can handle temperatures up to 850°C and can process materials such as gallium arsenide and silicon. HEATHWAY Asset is capable of handling wafers of up to 12" and can process up to six wafers at a time. Model is also equipped with a variety of monitoring systems and interfaces, allowing the user to keep an eye on the wafer's progress. HEATHWAY Equipment is an efficient and effective System for wafer processing, providing users with high-quality semiconductor products with outstanding efficiency. With its advanced design features, it can provide consistent and reliable results, minimizing maintenance costs.
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