Used JEOL TAM200XM-S #293649787 for sale

JEOL TAM200XM-S is an advanced, other wafer processing equipment used for the both prototyping and production of integrated circuits. Designed by JEOL, a major manufacturer of wafer processing tools, TAM200XM-S is an automated system that can handle up to 200mm wafers. It utilizes vertical, single-stage transport to carry the wafers through its multiple process chambers, allowing the user to perform consistently precise operations on a variety of substrates. It features a variety of user operations, including etching, deposition, ion implantation, photolithographic patterning, and thermal oxidation, among others. Additionally, JEOL TAM200XM-S offers advanced control measures and options for temperature, pressure, and flow rate, allowing for a high degree of adjustability for processes that require it. The unit is also capable of integrating various support equipment such as laser interferometry and substrate heaters. The machine has an integrated CVC+ platform, which provides users with access to all primary wafer processing functions from a single control panel. The CVC+ can also be used to customize specific recipes, set cycle times, check for proper alignment and calculate yields. Additionally, the CVC+ is capable of monitoring tool health, scheduling maintenance and analyzing data for troubleshooting any issues encountered during the processing of each wafer. Finally, TAM200XM-S also uses a variety of advanced metrology capabilities, including optical sensor asset (OSS) and wet probe. OSS allows for in-process measurement of wafers while they are under process while wet probe offers a broad range of measurements in a dense pattern across the wafer surface. This combined with JEOL TAM200XM-S's upgradeable software ensures that users can stay up to date with the latest industry developments. TAM200XM-S thus provides an advanced, automated processing solution for both prototyping and production of integrated circuits.