Used KERRY SC 1000CL #148527 for sale

KERRY SC 1000CL is an automated wafer processing equipment designed with an array of process capabilities to improve yield, costs and throughput as well as safety in semiconductor wafer fabrication. The system combines a rotary wafer-processing chamber with a hot-wall containment device. Inside the containment device, temperature, humidity and particle levels are precisely controlled to less than 10 per cubic-foot. This ensures that contaminants cannot enter the process chamber, protecting delicate, sensitive wafer surfaces from contamination, equipment damage and yield loss. SC 1000CL also offers an integrated reaction chamber for performing vapour phase processes such as flexible Cleaning, All-Gas and ALD processes on wafers, such as etching, oxidation, nitridation, and deposition of metals. All necessary gases are easily supplied to the process chamber, ensuring efficient and repeatable process executions. The reaction chamber also features a heated wafer support surface and floating wafer pedestal for processing temperatures up to 800°C and repeatable temperature uniformity of ± 4°C. KERRY SC 1000CL is designed for mass-delivered processes as well as production of high-end semiconductor products. It can also be used in safety-critical applications where tight control of temperature, humidity and particle control is required. The unit's advanced automation controllers and software assist engineers in meeting the demanding specifications and safety requirements of the semiconductor industry. SC 1000CL also enables remote monitoring and data acquisition, making it an excellent solution for long-term process control projects. The machine is also certified with ISO9001 and ISO14001 quality and environmental standards, offering peace of mind and improved world-wide product acceptance. In conclusion, KERRY SC 1000CL tool is an advanced, automated wafer process asset, offering a high level of process repeatability and control for a variety of fabrication processes. It is an excellent solution for safety-critical applications and process control in the semiconductor industry.