Used MICRO AUTOMATION 2066SA #9028587 for sale

MICRO AUTOMATION 2066SA is an advanced, automated wafer processing equipment designed for precision and high throughput. It supports a wide range of process sequences with a minimal amount of manual intervention. This system is ideal for semiconductor processing, as it can accommodate 12" wafers from deposition, etching, cleaning and other substrate processing steps. 2066SA is equipped with a range of modules and features to support a wide range of semiconductor processing. The unit includes a load port, multi-chamber machine, process controller, load lock, tool storage rack, and process monitoring software. It also comes with advanced real-time monitoring of processes and data analysis tools. The Load Port of MICRO AUTOMATION 2066SA enables efficient loading of wafers into the tool with minimal manual intervention. This is supported by a Load Lock asset which provides accurate and consistent temperature control. It also allows for the rapid transfer of wafers between process chambers. The Multi-Chamber Model of 2066SA supports multi-stage process sequences such as metallization, deposition, etching, and cleaning. It features both wet and dry processes, allowing for flexibility and accuracy when dealing with a wide range of substrates. Additionally, the equipment can process up to 12" wafers, enabling high throughput at higher yields. The Process Controller of MICRO AUTOMATION 2066SA allows for precise, real-time process control. It offers comprehensive control of parameters such as pressures, temperatures, and ramp rates to ensure accuracy and repeatability. Additionally, the controller can be interfaced with any vacuum system, allowing for further process optimization. The Tool Storage Rack of 2066SA allows for the storage of a wide range of process modules, enabling high throughput and flexibility. It can accommodate multiple sub-modules, including plasma guns, pyrometers, etchers, and cryo-pumps. The Process Monitoring Software of MICRO AUTOMATION 2066SA provides users with real-time feedback on the status of process parameters. It also allows users to monitor substrate performance and product yields, helping to optimize production. Additionally, the software includes visualization tools for quick and easy analysis of data. 2066SA is a powerful, automated wafer processing unit designed for high throughput and repeatability. It offers a wide range of advanced features and modules which enable users to achieve accurate, high-yield results across a range of process sequences.