Used MKS 1153A #77147 for sale

MKS 1153A is a state-of-the-art other wafer processing equipment produced by MKS Instruments Inc. The system is designed to reduce the time and manual labor required to produce integrated circuits and MEMS devices on wafers. It is a cost-effective and user-friendly wafer processing solution. The unit consists of a robust frame and a user-friendly touchscreen controller. It is capable of producing integrated circuits with a minimum feature size of 200 nanometers and MEMS devices with a minimum feature size of 10 nanometers. The machine also has a powerful 3-axis robotic arm, capable of precise and repeatable movements. Its stepper motors can move the arm with a positioning accuracy of 0.5 microns at speeds up to 6 metres per second. The tool also utilizes a precision temperature-control asset to ensure precise temperature control during the wafer process. 1153A is equipped with multiple vacuum and gas delivery systems for precise and reliable process control. The vacuum and gas delivery systems can be programmed to precisely manipulate process parameters such as volume, flow rate, pressure, and conductivity. The model can be used with a variety of substrates including silicon, glass, ceramics, and metals as well as a variety of etchants, plasmas and chemicals. The equipment has an advanced monitoring and safety system with multiple alarms and safety shut-off features. MKS 1153A is an ideal solution for integrated circuit and MEMS fabrication businesses. Its precise, repeatable, and efficient performance is ideal for a wide range of other wafer processing techniques. This unit is highly reliable and cost-effective for any established circuit and MEMS fabrication business.