Used MKS / ASTEX Astron ex #293647823 for sale

MKS / ASTEX Astron ex is a precision automated wafer processing equipment designed for the most challenging front-end and back-end applications, including lithography and plating. The system offers flexibility, high throughput and small footprint while meeting the most stringent accuracy requirements. MKS Astron ex offers a wide variety of process modules to accommodate any type of wafer, including standard, custom and ultra-high density wafers. ASTEX Astron ex features an intuitive touchscreen interface for easy operation. It is capable of processing up to 200 wafers per hour with its innovative 8-station batch processing technology. The precision multi-axis motion capabilities allow the machine to achieve sub-micron accuracy in pattern alignment, with a registration accuracy of +/- 0.6 μm and a thickness accuracy of +/- 0.4 μm. Unique features of Astron ex include automated alignment of wafer centroids, automatic focus control, dynamic face detection and alignment, and automated systematic over-scanning. Unit operators can objectively inspect the alignment of each wafer before or during the process, and controlling the amount of contamination on incoming and outgoing wafers. In addition, the machine is designed with a wide variety of optional, advanced module capabilities, such as high-accuracy plating, wafer-to-wafer networking, anti-contamination steps, and multiple wafer handling systems. The modular design of MKS / ASTEX Astron ex also allows for easy upgrades and feature additions, enabling users to quickly configure the machine to meet their specific needs. The advanced and robust tool of MKS Astron ex allows manufacturers to process high-density semiconductor devices with excellent repeatability and uniformity in a safe and efficient manner. Its modular design and intuitive operation make it the ideal choice for the most challenging and complex wafer applications.