Used MKS ASTeX FI20620-1 #9165071 for sale

MKS FI 20620-1 is an advanced other wafer processing equipment designed for high-precision and high-throughput operation. The system is capable of processing wafers up to 300mm in diameter and is equipped with four process chambers along with two independent vacuum systems to ensure reliability and precision. Additionally, the unit has a precision robot arm capable of placing and retrieving each wafer precisely to the maximum position accuracy of 5 microns. The machine also features an advanced graphical environment control package called DELTA®. This control package contains a wide variety of features that provides users with a choice of recipes and settings that can be optimized for specific processes. This broad range of features enables the user to create simple or complex recipes and thereby easily optimizing wafer processing recipes for yield and throughput. MKS FI20620-1 also contains a wide variety of sophisticated wafer handling options. This includes processes such as the chuck alignment to hold the wafer during loading, automatic pre-aligning, and patch inspection. The tool also contains pre-alignment and pellicle inspection capabilities, so process recipes can be adapted to include alignment requirements. In addition, the asset boasts a range of special features designed to optimize the process stability, yield, and throughput. This includes an enhanced wafer sensing program which monitors wafer on-axis profile errors, stabilization of the process underlying circumstances, as well as pressure control and second order tracking for process stabilization at the front-end-of-the-line. Overall, FI 20620-1 is a powerful and precise other wafer processing model that enables users to create complex recipes and optimize processes for increased yield and throughput. The equipment boasts a wide variety of sophisticated wafer handling, off-axis alignment, pre-alignment, and pellicle inspection capabilities along with an enhanced wafer sensing program which makes it an ideal choice for precise and high-throughput operation.