Used MKS FI 80131 #9165072 for sale

MKS FI 80131 is an other wafer processing equipment developed by MKS Instruments. This automated wafer processing system is designed to provide reliable, repeatable performance for each wafer processed. It features an integrated design enabling a single robot to transport each wafer or wafer stack from the load port to the processing chamber. An automated transfer arm positions each wafer in the chamber's process area, enabling process parameters to be accurately determined based on wafer size, material, and thickness. The chamber of MKS FI80131 is equipped with a high-pressure Chemical Vapor Deposition (CVD) unit that provides the optimal conditions need for consistent, uniform wafer coatings. The pump-down speed is adjustable to suit different process requirements and can be operated in both pressure and vacuum modes. Additionally, the chamber's temperature range is adjustable from -20°C to +400°C, making it suitable for a wide variety of processes such as oxidation, nitridation, annealing, and diffusion. This machine also features a fully automated Isolation Valve (IPV) tool, a safety feature allowing for any trapped gas within the chamber to be quickly returned to the atmosphere. The IPV asset also facilitates the introduction of predetermined gas volumes into the chamber, enabling the formation of precisely defined layers with a repeatable thickness. To ensure maximum wafer layer quality and uniformity, this model is equipped with an advanced software package that provides full control over all process parameters. The software allows users to easily store process recipes, adjust setpoints, and monitor wafer temperature, pressure, and pump-down speed. Real-time monitoring and logging features also enable users to record important chamber conditions such as temperature, pressure, and deposition rate for each wafer layer. Ideal for use in academic and industrial wafer fabrication environments, FI 80131 is both reliable and easy to operate. Its innovative design and integrated software equipment ensure the highest level of wafer layer consistency and quality, making it the perfect choice for any wafer processing application.