Used MKS RPS 2L #9052456 for sale

MKS RPS 2L is a multi-wafer, high-throughput, wafer processing equipment specifically designed to address the increasing demands of backend semiconductor processes. RPS 2L is a full-featured wafer process system that is built for high-precision wafer processing. It is optimized for precision applications such as RTP (Rapid Thermal Processing), ECD (Electrolytic Chemical Deposition), Photolithography, and sputtering. MKS RPS 2L provides high precision, fewer defects, improved yield and tool availability. RPS 2L has an intuitive HMI that allows for easy operation and process control with minimal setup time. The unit is capable of handling up to 200mm wafers in a single cassette, allowing for massive throughput and high yield. Additionally, it offers precise control over uniformity, temperature, and process time. The machine also comes equipped with automated wafer transport, with minimal manual handling. This helps reduce contamination and provides cost savings for a wide range of production needs. Furthermore, MKS RPS 2L is constructed of durable stainless steel and features high efficiency thermal management for reduced cost of ownership. It also provides excellent temperature uniformity across wafers for improved process control and precision. To further optimize efficiency, the tool also features an integrated vacuum chamber that minimizes wafer temperature changes and reduces the amount of downtime due to maintenance requirements. Lastly, RPS 2L features a modular design, making it the perfect choice for asset upgrades or expansion. This allows for quick turnaround and cost savings, as well as the flexibility to accommodate various requirements. Overall, MKS RPS 2L is an effective and high-precision wafer process model that provides the perfect solution for a wide range of backend semiconductor processes.