Used PBT Miniclean #9313059 for sale

PBT Miniclean equipment is a fully automated, high precision wafer cleaning system that provides a safe, reliable, and economical method of developing and manufacturing integrated circuits on semiconductor wafers. The unit comprises a pre-rinse station, a heated single-stage spray cleaning station, and a post-rinse station. At the pre-rinse station, incoming wafers are pre-cleaned with a detergent solution and then rinsed with deionized water, thus removing gross particulate debris from their surface. At the heated single-stage spray cleaning station, wafers are exposed to an etchant, or cleaning agent, at a specific temperature. This is done for several minutes, and depending on the application a variety of etchants may be used. After the etching process, the wafers are then raised to a temperature that allows thorough rinsing away of both the cleaning agent and any remaining particulate matter from the surface of the wafer. Finally, the post-rinse station is used for drying the wafers. Miniclean also features a unique robotic wafer handling machine for precise positioning of the wafers and an integrated wafer loading/unloading station for easy handling. The robotic tool has a safety interlock asset for protecting operators from incidents caused by equipment malfunctioning, and a contamination control model which recycles, filters, and distillates the cleaning agent for improved utilization. The equipment also includes a vacuum system for modifying the cleaning chamber pressure, if necessary, and a special wafer monitoring unit for detecting and documenting any defects occurring during the cleaning process. The machine is operated by manual, semi-automatic, or fully automatic mode, providing users with full control over process parameters such as temperature, cleaning time, and rinsing chemistry. Using PBT Miniclean united with best-in-class process recipes, operators can achieve defect-free cleaning and reduced operational costs. Furthermore, its user-friendly design allows for straightforward installation and maintenance. The tool is suitable for cleanroom environments and can be used in a variety of wafer processing applications from masking and scrubbing, to etching and chemical/mechanical polishing.