Used PERKIN ELMER / WALLAC Trilux Microbeta 1450 #195143 for sale
URL successfully copied!
PERKIN ELMER / WALLAC Trilux Microbeta 1450 is a state-of-the-art other wafer processing equipment designed with the highest level of performance and reliability in mind. It features a three-axis, high-precision, pneumatically actuated wafer transfer robot for reliable, accurate wafer positioning and handling. The robot is uniquely designed to allow for wafer rotation in both XY and Z planes. This feature provides ultimate flexibility and allows the system to be used for a variety of applications. Additionally, the robot can be programmed to move at the optimal rate in order to ensure precise accuracy and repeatability of movements, all without sacrificing speed. WALLAC Trilux Microbeta 1450 is equipped with an advanced thermal processing station using multiple heated independent zones. It also is designed with a dedicated surface acquisition station, allowing for the automatic adjustment of chuck temperature and processing parameters such as the RF power and bias. This feature helps achieve superior uniformity and productivity, while also reducing cost. In addition, PERKIN ELMER Trilux Microbeta 1450 offers a precise and automated liquid dispensing station for reliable and repeatable dispensing of liquid chemistries. This feature enables the unit to be used for a wide range of wet processes, such as chemical etching, surface treatment, and coating. Finally, Trilux Microbeta 1450 features a vision-enhanced accuracy inspection, providing conclusive results for comprehensive wafer quality control. Overall, PERKIN ELMER / WALLAC Trilux Microbeta 1450 is an ideal other wafer processing machine for high-throughput and high-precision operations. Its robotic wafer transfer, advanced thermal processing station, liquid dispensing station, and vision-enhanced accuracy inspection all contribute to providing excellent results with the highest degree of reliability. This tool is well-suited for applications in a variety of industries, including semiconductor and electronics manufacturing, solar photovoltaics, and bio-medical engineering.
There are no reviews yet