Used SEZ / LAM RESEARCH DV-38 DS #9240169 for sale

SEZ / LAM RESEARCH DV-38 DS etcher is a state-of-the-art, premixed, low-pressure, direct-downstream plasma etching equipment. This etcher is specifically designed for applications requiring ultra-high etching quality and uniformity. SEZ DV-38 DS is the ideal etching system for a variety of material types, including compound semiconductor materials, titanium nitride, diamond, and nitride hard masks. This unit utilizes a powerful downstream plasma processing machine to ensure excellent etching rates. LAM RESEARCH DV-38 DS tool employs an inductively coupled plasma (ICP) source for the plasma generation. This type of plasma source provides superior repeatability, long life, and high levels of pressure control. The pressure is adjustable to optimize etch rates and uniformity while minimizing contamination or "memory effects". The dual-plasma source configuration further boosts performance and eliminates the need for periodic replenishment of consumables. DV-38 DS is equipped with precision mass flow controllers for low-pressure control and exact amounts of working gas. The asset also has variable gas injection with small nozzle technology for a highly uniform gas flow and more accurate control of ion bombardment. This provides better feature profiles, higher definition, improved isotropic etch rate, and better selectivity. For enhanced etch uniformity and more efficient material removal, SEZ / LAM RESEARCH DV-38 DS model also has a "hot edge" feature. This feature helps to enhance etch uniformity and makes power levels more consistent at the edges of the wafer. SEZ DV-38 DS equipment is designed for high-volume production with thorough process control in mind. It features a fully automated load/unload station and a high-quality vacuum system to ensure constant, clean conditions. The computer-controlled interface allows for access to all major process parameters from a single location. Additionally, optional software modifications can be made to the unit to further improve etch quality and repeatability. This advanced etcher is a valuable asset for those needing high-precision results. LAM RESEARCH DV-38 DS machine provides superior etching rates, uniformity, and repeatability, allowing manufacturers and researchers to process materials with confidence.