Used SIMCO Aerostat XC #9006700 for sale
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SIMCO Aerostat XC is a wafer processing equipment designed with the highest standards for maximum process flexibility and quality control. This system is used to perform a wide variety of proprietary processes from both semiconductor manufacturers and research facilities. Aerostat XC is an automated vacuum and plasma processing unit that can be configured for PECVD deposition of oxides, nitrides, and other materials and etching of a wide range of films. It features in-situ contamination control with a precisely balanced vacuum and gas environment, minimizing particle generation and providing for a clean processing environment. This machine is equipped with high-pressure plasma sources that are designed to provide high uniformity of plasma over the entire wafer surface. The tool is also equipped with a full range of process monitoring and chamber diagnostics features, including the ability to independently control up to 4 independent RF power sources per chamber. This enables the user to operate the asset at multiple frequencies to improve and optimize process uniformity. SIMCO Aerostat XC provides maximum flexibility for process control. Its offers a complete array of real-time process monitoring functions which enable the user to adjust processing conditions for maximum performance. In addition, the model is designed to integrate with other CAD/CAM software for more sophisticated data collection and control capabilities. Aerostat XC is also designed for maximum safety. The chamber is constructed to handle potentially hazardous plasma conditions, and the enclosed glovebox utilizes HEPA filters and a double airlock equipment for maximum protection against contaminants. Additionally, all chamber components and process software are designed to meet stringent safety standards. Finally, SIMCO Aerostat XC is designed for superior performance and reliability. Built with the highest quality components and engineering standards, this system provides for the most efficient and reproducible process performance and results. Additionally, this unit is backed by a committed service and support team which includes dedicated service technicians for instant service escalation. As a result, Aerostat XC is a versatile, reliable, and high quality tool for wafer processing.
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